Readings:
STM Chamber ( ago...): Ion Gauge = Cold Head = Scanner = Piezo Voltage = Tunneling Current = |
Gas-Leak Station ( ago...): Ion Gauge = Turbo Temp = Chamber Temp = |
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This graph monitors the temperature and pressure of a chamber during a bakeout. The purpose of a bakeout is to desorb all the species that are lining the inside walls of the chamber vacuum system. Do do this, the system is heated to roughly 150°C, forcing the desorption of most volatile species. After all of these species are pumped out and the system is allowed to cool back down to room temperature, it's base pressure will be 10 - 100 times lower. Bakeouts are necessary if ultra high vacuum (UHV) is desired.